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[null,"1.","Record Nr.",null,"UNINA9911019555703321"]
[null,null,"Autore",null,"Kohler"]
[null,null,"Titolo",null,"Atzverfahren Fur Die Mikrotechnik"]
[null,null,"Pubbl/distr/stampa",null,"[Place of publication not identified], : Wiley VCH Imprint, 1998"]
[null,null,"ISBN",null,"1-280-55937-3"]
[{"$nulls":4},"9786610559374"]
[{"$nulls":4},"3-527-60291-7"]
[null,null,"Descrizione fisica",null,"1 online resource (409 pages)"]
[null,null,"Disciplina",null,"540"]
[null,null,"Soggetti",null,"Masks (Electronics)"]
[{"$nulls":4},"Microlithography"]
[{"$nulls":4},"Plasma etching"]
[null,null,"Lingua di pubblicazione",null,"Tedesco"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","Bibliographic Level Mode of Issuance: Monograph"]
[null,null,"Nota di contenuto",null,"Einführung -- Besonderheiten mikrotechnischer Ätzverfahren -- Nassätzverfahren -- Trockenätzverfahren -- Mikroformgebung durch Ätzen von lokal verändertem Material -- Ausgewählte Vorschriften."]