{"text_format":"2","workbook":"xls","n_sheets":1,"sheets":["report2"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":1,"defined_names":1,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"report2","index":0,"n_rows":18,"n_cols":5,"rows_kept":18,"cut":false,"hidden":false,"merged":[[0,2,0,3],[0,4,0,5],[1,2,1,3],[1,4,1,5],[2,2,2,3],[3,2,3,3],[7,2,7,3],[8,2,8,3],[9,2,9,3],[10,2,10,3],[12,2,12,3],[13,2,13,3]],"flags":["formulas_cached_only"]}
[null,"1.","Record Nr.",null,"UNINA9911006676203321"]
[null,null,"Titolo",null,"Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) / / edited by Gary E. McGuire"]
[null,null,"Pubbl/distr/stampa",null,"Park Ridge, N.J., U.S.A., : Noyes Publications, c1988"]
[null,null,"ISBN",null,"1-282-02744-1"]
[{"$nulls":4},"9786612027420"]
[{"$nulls":4},"0-8155-1898-6"]
[{"$nulls":4},"1-59124-252-5"]
[null,null,"Descrizione fisica",null,"1 online resource (689 p.)"]
[null,null,"Collana",null,"Materials science and process technology series"]
[null,null,"Disciplina",null,"621.395"]
[null,null,"Soggetti",null,"Integrated circuits - Very large scale integration - Design and construction"]
[{"$nulls":4},"Semiconductors"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","Bibliographic Level Mode of Issuance: Monograph"]
[null,null,null,"Nota di bibliografia","Includes bibliographical references and index."]
[null,null,null,"Sommario/riassunto","This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together \"snapshots\" of the various aspects of the technology."]