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[null,"1.","Record Nr.",null,"UNINA9910830177003321"]
[null,null,"Autore",null,"Tung Chih-Hang <1963->"]
[null,null,"Titolo",null,"ULSI semiconductor technology atlas / / Chih-Hang Tung, George T.T. Sheng, Chih-Yuan Lu [[electronic resource]]"]
[null,null,"Pubbl/distr/stampa",null,"Hoboken, NJ, : John Wiley, c2003"]
[null,null,"ISBN",null,"1-280-55680-3"]
[{"$nulls":4},"9786610556809"]
[{"$nulls":4},"0-471-66878-8"]
[{"$nulls":4},"0-470-35744-4"]
[{"$nulls":4},"0-471-66879-6"]
[null,null,"Descrizione fisica",null,"1 online resource (xii, 666 p. ) : ill. ;"]
[null,null,"Disciplina",null,"621.39/5"]
[null,null,"Soggetti",null,"Integrated circuits - Ultra large scale integration"]
[{"$nulls":4},"Electron microscopy"]
[{"$nulls":4},"Electrical Engineering"]
[{"$nulls":4},"Electrical & Computer Engineering"]
[{"$nulls":4},"Engineering & Applied Sciences"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","Bibliographic Level Mode of Issuance: Monograph"]
[null,null,null,"Nota di bibliografia","Includes bibliographical references and index."]
[null,null,null,"Sommario/riassunto","Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems."]