{"text_format":"2","workbook":"xls","n_sheets":1,"sheets":["report2"],"not_rendered":{"charts":0,"images":0,"macros":0,"external_links":1,"defined_names":1,"comments":0,"pivot_tables":0},"unopened":[],"bounds":{"document_bytes":16777216,"sheet_cells":100000,"run_cost":"one","rows_first":2000,"rows_last":500,"rows_between":2000,"halvings":0,"cell_chars":16384,"cell_head_chars":4096},"cells_cut":0,"cells_raw":0,"read":"whole","date_system":"1900","formulas":"cached_only"}

{"sheet":"report2","index":0,"n_rows":23,"n_cols":5,"rows_kept":23,"cut":false,"hidden":false,"merged":[[0,2,0,3],[0,4,0,5],[1,2,1,3],[1,4,1,5],[2,2,2,3],[2,4,2,5],[3,2,3,3],[5,2,5,3],[6,2,6,3],[7,2,7,3],[8,2,8,3],[11,2,11,3],[12,2,12,3],[16,2,16,3]],"flags":["formulas_cached_only"]}
[null,"1.","Record Nr.",null,"UNINA9910788294403321"]
[null,null,"Autore",null,"Bhattacharyya Bijoy"]
[null,null,"Titolo",null,"Electrochemical micromachining for nanofabrication, MEMS and nanotechnology / / Bijoy Bhattacharyya"]
[null,null,"Pubbl/distr/stampa",null,"Amsterdam, [Netherlands] : , : William Andrew, , 2015"]
[{"$nulls":4},"©2015"]
[null,null,"Descrizione fisica",null,"1 online resource (297 p.)"]
[null,null,"Collana",null,"Micro & Nano Technologies Series"]
[null,null,"Disciplina",null,"671.35"]
[null,null,"Soggetti",null,"Micromachining"]
[{"$nulls":4},"Nanotechnology"]
[{"$nulls":4},"Microelectromechanical systems"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","Description based upon print version of record."]
[null,null,null,"Nota di bibliografia","Includes bibliographical references at the end of each chapters and index."]
[null,null,"Nota di contenuto",null,"Front Cover; Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology; Copyright; Dedication; Contents; About the Author; Foreword; Preface; Acknowledgment; Symbols; CHAPTER 1 - INTRODUCTION; 1.1 MICROMACHINING AND NANOFABRICATION; 1.2 MEMS AND MICROSYSTEMS; 1.3 CONDITIONS FOR MICROMACHINING AND NANOFABRICATION; 1.4 TYPES OF MICROMACHINING PROCESSES; 1.5 ELECTROCHEMICAL MICROMACHINING; 1.6 ELECTROCHEMICAL TECHNOLOGY FOR MICROSYSTEMS AND NANOFABRICATION; REFERENCES; CHAPTER 2 - ELECTROCHEMICAL MACHINING: MACRO TO MICRO; INTRODUCTION; 2.1 BACKGROUND OF ECM"]
[{"$nulls":4},"2.2 FUNDAMENTALS OF ANODIC DISSOLUTION2.3 IMPORTANT INFLUENCING FACTORS OF ECM FOR MICROMACHINING; 2.4 EMM: PRESENT STATUS; REFERENCES; CHAPTER 3 - PRINCIPLE OF MATERIAL REMOVAL IN ELECTROCHEMICAL MICROMACHINING; 3.1 MECHANISM OF MATERIAL REMOVAL; 3.2 EQUIVALENT ELECTRICAL CIRCUIT FOR EMM; 3.3 MRR MODEL; REFERENCES; CHAPTER 4 - TYPES OF EMM; INTRODUCTION; 4.1 THROUGH-MASK EMM; 4.2 MASKLESS EMM; 4.3 THREE-DIMENSIONAL EMM; REFERENCES; CHAPTER 5 - ELECTROCHEMICAL MICROMACHINING SETUP; 5.1 DETAILS OF EMM SETUP; 5.2 CURRENT STATUS OF DEVELOPMENTS IN EMM SETUP; 5.3 IEG CONTROL STRATEGY; REFERENCES"]
[{"$nulls":4},"CHAPTER 6 - DESIGN AND DEVELOPMENTS OF MICROTOOLSINTRODUCTION; 6.1 TYPES OF EMM TOOLS; 6.2 "]
[{"$nulls":4},"MICROTOOL DESIGN FOR EMM; 6.3 METHODS OF MICROTOOL FABRICATION; 6.4 EMM FOR MICROTOOL FABRICATION; 6.5 DIFFERENT FEATURES OF MICROTOOLS FABRICATED BY EMM; REFERENCES; CHAPTER 7 - INFLUENCING FACTORS OF EMM; INTRODUCTION; 7.1 EMM POWER SUPPLY; 7.2 ELECTROLYTE FOR EMM; 7.3 INFLUENCE OF IEG; 7.4 INFLUENCE OF TEMPERATURE, CONCENTRATION, AND ELECTROLYTE FLOW; 7.5 INFLUENCE OF TOOL FEED RATE; REFERENCES; CHAPTER 8 - IMPROVEMENT OF MACHINING ACCURACY; INTRODUCTION; 8.1 TOOL INSULATION"]
[{"$nulls":4},"8.2 ELECTROLYTE CIRCULATION8.3 SHAPE OF THE MICROTOOL; 8.4 TOOL MOVEMENT STRATEGY; 8.5 STRAY CURRENT AND MICROSPARKS PHENOMENA IN EMM; 8.6 HYBRID EMM; 8.7 SELECTION OF COMBINATION OF MACHINING PARAMETERS; REFERENCES; CHAPTER 9 - ADVANTAGES, LIMITATIONS, AND APPLICATIONS OF EMM; INTRODUCTION; 9.1 ADVANTAGES; 9.2 APPLICATIONS; 9.3 LIMITATIONS AND REMEDIES; REFERENCES; CHAPTER 10 - MICRODEVICES FABRICATION FOR MICROELECTROMECHANICAL SYSTEMS AND OTHER MICROENGINEERING APPLICATIONS; INTRODUCTION; 10.1 MICROELECTROMECHANICAL SYSTEMS; 10.2 SEMICONDUCTOR MICROMACHINING BY EMM"]
[{"$nulls":4},"10.3 MICROENGINEERING APPLICATIONSREFERENCES; CHAPTER 11 - ELECTROCHEMICAL MICROSYSTEM TECHNOLOGY; INTRODUCTION; 11.1 FEATURES OF EMST; 11.2 SCALING DOWN AND SCALING UP; 11.3 ELECTROCHEMICAL MICROCELL AND MICROELECTRODE; 11.4 ELECTROCHEMICAL REACTIONS IN EMST; 11.5 APPLICATIONS OF EMST IN MICROSYSTEM TECHNOLOGY; REFERENCES; CHAPTER 12 - RECENT ADVANCEMENTS IN EMM FOR MICRO AND NANOFABRICATION; INTRODUCTION; 12.1 WIRE EMM; 12.2 SOLID-STATE EMM; 12.3 SURFACE STRUCTURING; 12.4 ELECTROCHEMICAL WET STAMPING; 12.5 ELECTROCHEMICAL PATTERNING BY ENFACE TECHNOLOGY; 12.6 NANOFABRICATION BY EMM"]
[{"$nulls":4},"REFERENCES"]