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[null,"1.","Record Nr.",null,"UNINA9910705874403321"]
[null,null,"Autore",null,"Pantic Dragan M."]
[null,null,"Titolo",null,"Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP / / Dragan M. Pantie [and four others]"]
[null,null,"Pubbl/distr/stampa",null,"Cleveland, Ohio : , : National Aeronautics and Space Administration, Lewis Research Center, , [1990]"]
[null,null,"Descrizione fisica",null,"1 online resource (15 pages) : illustrations"]
[null,null,"Collana",null,"NASA technical memorandum ; ; 102544"]
[null,null,"Soggetti",null,"Capacitance-voltage characteristics"]
[{"$nulls":4},"Electron beams"]
[{"$nulls":4},"Indium phosphides"]
[{"$nulls":4},"Irradiation"]
[{"$nulls":4},"Phosphorus"]
[{"$nulls":4},"Plasmas (physics)"]
[{"$nulls":4},"Radiation damage"]
[{"$nulls":4},"Vapor deposition"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Note generali","\"Performing organization: National Aeronautics and Space Administration, Lewis Research Center\"--Report documentation page."]
[null,null,null,"Nota di bibliografia","Includes bibliographical references (page 13)."]