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[null,"1.","Record Nr.",null,"UNINA9910469149103321"]
[null,null,"Titolo",null,"2020 International Symposium on Semiconductor Manufacturing (ISSM) : proceedings of technical papers : December 15-16, 2020 / / Institute of Electrical and Electronics Engineers"]
[null,null,"Pubbl/distr/stampa",null,"Piscataway, New Jersey : , : IEEE, , 2020"]
[null,null,"ISBN",null,"1-66540-364-0"]
[null,null,"Descrizione fisica",null,"1 online resource (141 pages) : illustrations"]
[null,null,"Disciplina",null,"670.285"]
[null,null,"Soggetti",null,"Computer integrated manufacturing systems"]
[{"$nulls":4},"Engineering design"]
[{"$nulls":4},"Manufacturing processes - Data processing"]
[null,null,"Lingua di pubblicazione",null,"Inglese"]
[null,null,"Formato",null,"Materiale a stampa"]
[null,null,null,"Livello bibliografico","Monografia"]
[null,null,null,"Sommario/riassunto","ISSM is an annual conference of semiconductor manufacturing professionals dedicated to sharing technical solutions and opinions on the advancement of manufacturing science, technologies, and management disciplines ISSM aims to establish new concepts for semiconductor manufacturing technologies and to promote them as systemized and universalized technologies ISSM s role has been to challenge the concept of shifting from know how to science in semiconductor manufacturing technologies ISSM covers the areas of interest including factory design & material handling, manufacturing strategy and operation management, manufacturing control and execution, environment safety and health, process integration, process and material optimization, yield enhancement methodology, contamination control and ultraclean technology, process control and monitoring, process and metrology equipment, DFM, and final manufacturing."]