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200 12$aA file management system for a laboratory automation facility /$fPeter S. Shoenfield; Lawrence J. Kaetzel
210  1$aGaithersburg, MD :$cU.S. Dept. of Commerce, National Institute of Standards and Technology,$d1975.
215   $a1 online resource
225 1 $aNBSIR ;$v75-713
300   $a1975.
300   $aContributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
300   $aTitle from PDF title page.
320   $aIncludes bibliographical references.
700   $aShoenfield$b Peter S$01411610
701   $aKaetzel$b Lawrence J$01392798
701   $aShoenfield$b Peter S$01411610
712 02$aUnited States.$bNational Bureau of Standards.
801  0$bNBS
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182  1$6z01$an
200 1 $aˆAn ‰introduction to physics and technology of thin films$fAlfred Wagendistrel, Yuming Wang
210   $aSingapore [etc.]$cWorld scientific$dc1994
215   $aXI, 147 p.$cill.$d23 cm.
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676   $a530.4175$9FISICA SUPERFICIALE. Film sottili$v22
700  1$aWagendristel$b, Alfred$3UFIV125354$4070$0772100
701  1$aWang$b, Yuming$3UFIV125356$4070$0772101
790  1$aWang$b, Yu-ming$3NAPV152781$zWang, Yuming
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996   $aIntroduction to physics and technology of thin films$91576047
997   $aUNISANNIO