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101 | $aeng
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181  1$6z01$ai $bxxxe  
182  1$6z01$an
200 1 $aˆVol. 1: ‰Process technology$fStanley Wolf, Richard N. Tauber
210   $aSunset Beach (Cal.)$cLattice press$dc1986
215   $aXXIV, 660 p.$cill.$d25 cm.
461  1$1001RMS0034267$12001 $aSilicon processing for the VLSI era$fStanley Wolf, Richard N. Tauber$v1
606   $aCircuiti integrati$2FIR$3CFIC002586$9E
676   $a621.3815$9ELETTRONICA. COMPONENTI E CIRCUITI$v14
676   $a621.3815$9$v22
696   $aChip$aCircuiti elettronici integrati
699   $aCircuiti integrati$yChip
699   $aCircuiti integrati$yCircuiti elettronici integrati
700  1$aWolf$b, Stanley$f <1943-    >$3MILV138426$4070$08670
701  1$aTauber$b, Richard N.$3RMSV019918$4070$08671
801  3$aIT$bIT-000000$c20091019
850   $aIT-BN0095          
912   $aRMS0034268
950  2$aBiblioteca Centralizzata di Ateneo$cv. 1;3$d 01SALA DING 621.3815                WOL.si$e 0102 0000007525  VMA A4(0001               v. 1$fY $h19940223$i19940223
977   $a 01
996   $aProcess technology$91574691
997   $aUNISANNIO