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200 1 $aSilicon processing for the VLSI era$fStanley Wolf, Richard N. Tauber
210   $aSunset Beach (Cal.)$cLattice press
215   $a v.$d25 cm.
463  1$1001MIL0370705$12001 $a˜Vol. 3: The œsubmicron MOSFET$fStanley Wolf$v3
463  1$1001RMS0034268$12001 $a˜Vol. 1: œProcess technology$fStanley Wolf, Richard N. Tauber$v1
606   $aCircuiti integrati$2FIR$3NAPC004761$9I
676   $a621.3815$9ELETTRONICA. COMPONENTI E CIRCUITI$v14
676   $a621.3815$9INGEGNERIA ELETTRONICA. COMPONENTI E CIRCUITI$v22
700  1$aWolf$b, Stanley$f <1943-    >$3MILV138426$4070$08670
701  1$aTauber$b, Richard N.$3RMSV019918$4070$08671
801  3$aIT$bIT-NA0079$c20091019
850   $aIT-BN0095          
912   $aRMS0034267
950  1$aBiblioteca Centralizzata di Ateneo$bv. 1;3$cv. 1;3$d 01SALA DING 621.3815                WOL.si
967   $m2
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996   $aSilicon processing for the VLSI Era$9113992
997   $aUNISANNIO