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001 NAP0472458
005 20240906063120.0
010   $a0849339286
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101 | $aeng
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181  1$6z01$ai $bxxxe  
182  1$6z01$an
200 1 $aX-ray metrology in semiconductor manufacturing$fD. Keith Bowen, Brian K. Tanner
210   $aBoca Raton [etc.]$cCRC$cTaylor & Francis$d2006
215   $a279 p.$cill.$d25 cm.
606   $aSemiconduttori$2FIR$3NAPC093696$9I
606   $aRaggi X$xDiffrazione$2FIR$3NAPC270203$9E
676   $a621.3815$9ELETTRONICA. COMPONENTI E CIRCUITI$v14
676   $a621.38152$9Elettronica. Componenti e circuiti. Semiconduttori$v22
700  1$aBowen$b, David Keith$f <1940-    >$3NAPV112650$4070$0771023
701  1$aTanner$b, Brian K.$3MILV193145$4070$053806
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790  1$aBowen$b, D. Keith$3NAPV112651$zBowen, David Keith <1940-    >
790  1$aBowen$b, D. K.$3SBNV033730$zBowen, David Keith <1940-    >
801  3$aIT$bIT-NA0079$c20091019
850   $aIT-BN0095          
912   $aNAP0472458
950  0$aBiblioteca Centralizzata di Ateneo$b1 v.$c1 v.$d 01SALA DING 621.3815                BOW.xr$e 0102 0000060835    B A4                    1 v.$f3 $h20070110$i20070110
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996   $aX-ray metrology in semiconductor manufacturing$91573358
997   $aUNISANNIO