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001 991003427979707536
008 171114t20132013nyu      b    001 0 eng d
020   $a9780199861224
035   $ab14331731-39ule_inst
040   $aBibl. Dip.le Aggr. Matematica e Fisica - Sez. Fisica$beng
082 04$a621.3815/2$223
084   $aLC TK7871.85
084   $a621.3.2.4
100 1 $aCampbell, Stephen A.$0530264
245 10$aFabrication engineering at the micro- and nanoscale /$cStephen A. Campbell
250   $aFourth edition
264  1$aNew York :$bOxford University Press,$c[2013]
300   $axiv, 671 pages;$c24 cm
490 1 $aThe Oxford series in electrical and computer engineering
504   $aIncludes bibliographical references and index
650  4$aSemiconductors$xDesign and construction
907   $a.b14331731$b14-03-18$c30-11-17
912   $a991003427979707536
945   $aLE006 621.3.2 CAM$g1$i2006000179294$lle006$op$pE150.00$q-$rn$so  $t1$u0$v0$w1$x0$y.i15839278$z14-03-18
996   $aFabrication engineering at the micro- and nanoscale$91495183
997   $aUNISALENTO
998   $ale006$b14-11-17$cm$da  $e $feng$gnyu$h0$i0