LEADER 01075nam a2200313 i 4500 001 991003078279707536 005 20021122115229.0 008 020220s2000 us ||| | eng 020 $a0471330019$c197000 035 $ab11751514-39ule_inst 035 $aLE00646226$9ExL 040 $aDip.to Fisica$bita 082 0 $a53.7.8 082 0 $a53.8.3 082 0 $a671.7'35 082 0 $aTS695.M32 100 1 $aMahan, John E.$0530349 245 10$aPhysical vapor deposition of thin films /$cJohn E. Mahan 260 $aNew York :$bJohn Wiley & Sons,$cc2000 300 $axiii, 312 p. :$bill. (some col.) ;$c24 cm. 500 $aIncludes bibliographical references and index. 650 4$aThin films 650 4$aVapor-plating 907 $a.b11751514$b21-09-06$c22-11-02 912 $a991003078279707536 945 $aLE006 53.7.8+53.8.3 MAH$g1$i2006000085090$lle006$o-$pE0.00$q-$rl$s- $t0$u0$v0$w0$x0$y.i11994150$z22-11-02 996 $aPhysical vapor deposition of thin films$9904543 997 $aUNISALENTO 998 $ale006$b01-01-02$cm$da $e-$feng$gus $h0$i1