LEADER 01066nam a2200265 i 4500
001 991003066799707536
005 20021031120610.0
008 020528s1996    us            ||| | eng  
020   $a0195105087$cLire 215.300
035   $ab11749763-39ule_inst
035   $aLE02615115$9ExL
040   $aDip.to Ingegneria dell'Innovazione$bita
082 0 $a621.38152
100 1 $aCampbell, Stephen A.$0530264
245 14$aThe science and engineering of microelectronic fabrication /$cStephen A. Campbell
260   $aNew York ; Oxford :$bOxford University Press,$c1996
300   $axv, 536 p. :$bill ;$c24 cm
440  4$aThe oxford series in electrical engineering
650  4$aSemiconduttori - Tecnologia
907   $a.b11749763$b21-09-06$c05-11-02
912   $a991003066799707536
945   $aLE026 621.38152 CAM 01.01 1996$g1$i2026000012599$lle026$op$pE0.00$q-$rl$s-  $t4$u4$v2$w4$x0$y.i11989774$z05-11-02
996   $aScience and engineering of microelectronic fabrication$9905560
997   $aUNISALENTO
998   $ale026$b01-01-02$cm$da  $e-$feng$gus $h4$i1