LEADER 01337nas a2200325 i 4500
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008 011205m19839999   ||         |    |eng  
022   $a0734-2101
035   $ab11691347-39ule_inst
035   $aPERLE004982$9ExL
080   $aCDU 5
080   $aCDU 6
229  0$aJournal of vacuum science and technology A :$bVacuum, surfaces and films
245 00$aJournal of vacuum science and technology A :$bVacuum, surfaces and films /$cAmerican Vacuum Society, American Institute of Physics
260   $aNew York,$c1983-
500   $aPubblicato anche in formato elettronico.
591   $aCodice CNR: P 00081057
592   $aLE006 1983-2008;
710 2 $aAmerican Vacuum Society$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0316246
710 2 $aAIP <American Institute of Physics>
776   $x1520-8559
780 00$tJournal of vacuum science and technology
907   $a.b11691347$b25-11-14$c08-07-02
912   $a991002667609707536
945   $aLE006$g1$lle006$o-$pE0.00$q-$rn$so$t18$u0$v0$w0$x0$y.i11921614$z08-07-02
945   $aLE006$cVol. 26 (2008)$g1$lle006$op$pE649.34$rn$s-$t18$u0$v0$w0$x0$y.i15645629$z25-11-14
996   $aJournal of vacuum science and technology A$91453161
997   $aUNISALENTO
998   $ale006$b01-01-01$cs$da$e-$feng$gxx$h0$i1