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008 011205m19919999   ||         |    |eng  
022   $a1071-1023
035   $ab11691335-39ule_inst
035   $aPERLE004978$9ExL
080   $aCDU 62
229  0$aJournal of vacuum science & technology. B :$bMicroelectronics and nanometer structures. Processing, measurement and phenomena
245 00$aJournal of vacuum science & technology. B :$bMicroelectronics and nanometer structures. Processing, measurement and phenomena /$cAmerican Vacuum Society. - 1991-
260   $aNew York,$c1991-
500   $aPubblicato anche in formato elettronico.
592   $aLE006 1991-2008;
710 2 $aAmerican Vacuum Society$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0316246
780 00$tJournal of vacuum science & technology. B$bMicroelectronics processing and phenomena
856 41$uhttp://avspublications.org/jvstb/resource/1/jvtbd9$zE-journal (Publisher Site)
907   $a.b11691335$b25-11-14$c08-07-02
912   $a991002667549707536
945   $aLE006$g1$lle006$o-$pE0.00$q-$rn$so  $t18$u0$v0$w0$x0$y.i11921602$z08-07-02
945   $aLE006$cVol. 26 (2008)$g1$lle006$op$pE649.34$rn$s-  $t18$u0$v0$w0$x0$y.i15645630$z25-11-14
996   $aJournal of vacuum science & technology. B$91453160
997   $aUNISALENTO
998   $ale006$b01-01-01$cs$da  $e-$feng$gxx $h0$i1