LEADER 01023nam a2200265 i 4500
001 991001755899707536
008 080604s2004    enka     b    001 0 eng d
020   $a0863413358
035   $ab14065204-39ule_inst
082 0 $a621.381$221
245 00$aMEMS packaging /$cedited by Tai-Ran Hsu
260   $aLondon :$bInstitution of Electrical Engineers,$cc2004
300   $axxix, 275 p. :$bill. ;$c25 cm
440  0$aEMIS processing series ;$vno. 3
504   $aIncludes bibliographical references and index
650  4$aMicroelectromechanical systems
650  4$aMicroelectronic packaging
700 1 $aHsu, Tai-Ran
710 2 $aInstitution of Electrical Engineers
907   $a.b14065204$b28-01-14$c15-06-12
912   $a991001755899707536
945   $aLE026 621.381 HSU 01.01 2004$g1$i2026000061160$lle026$nProf. Catarinucci / Biblioteca$op$pE102.77$q-$rl$s-  $t4$u2$v0$w2$x0$y.i15423153$z15-06-12
996   $aMEMS packaging$9239792
997   $aUNISALENTO
998   $ale026$b04-06-08$cm$da  $e-$feng$genk$h0$i0