LEADER 01290nam a2200313 i 4500
001 991001236439707536
005 20020507113240.0
008 970308s1988    us            ||| | eng  
020   $a0815511507
035   $ab10192554-39ule_inst
035   $aLE00644403$9ExL
040   $aDip.to Fisica$bita
084   $a53(022)
084   $a53.8.22
084   $a53.9.1
084   $aTK7874
100 1 $aMcGuire, Gary E.$027694
245 10$aSemiconductor materials and process technology handbook :$bfor very large scale integration (VLSI) and ultra large scale integration (ULSI) /$cedited by Gary E. McGuire
260   $aPark Ridge, N.J :$bNoyes Publications,$c1988
300   $axiii, 675 p. :$bill. ;$c25 cm.
490 0 $aMaterials science and process technology series
500   $aIncludes bibliographies and index.
650  4$aIntegrated circuits-Very large scale integration-Design and construction Handbooks, manuals, etc.
907   $a.b10192554$b17-02-17$c27-06-02
912   $a991001236439707536
945   $aLE006 53.9.1 MCG$g1$i2006000084895$lle006$o-$pE0.00$q-$rl$s-  $t0$u3$v0$w3$x0$y.i10237562$z27-06-02
996   $aSemiconductor materials and process technology handbook$9191725
997   $aUNISALENTO
998   $ale006$b01-01-97$cm$da  $e-$feng$gus $h0$i1