LEADER 01445nam a2200337 i 4500 001 991001044959707536 005 20020507105616.0 008 990531s1998 de ||| | eng 020 $a354063973X 035 $ab10165721-39ule_inst 035 $aLE00641205$9ExL 040 $aDip.to Fisica$bita 084 $a53.2.65 084 $a621.3815'2'028 084 $aTK7836.M467 100 1 $aMetev, Simeon M.$0462629 245 10$aLaser-assisted microtechnology /$cSimeon M. Metev and Vadim P. Veiko 250 $a2nd upd. ed. 260 $aBerlin :$bSpringer-Verlag,$c1998 300 $axii, 270 p. :$bill. ;$c24 cm. 490 0 $aSpringer series in materials science ;$v19 500 $aIncludes bibliographical references and index. 650 4$aElectronic industries-Technological innovations 700 1 $aVeiko, Vadim P.$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0733195 907 $a.b10165721$b17-02-17$c27-06-02 912 $a991001044959707536 945 $aLE006 53.2.65 MET$g1$i2006000079013$lle006$nCopia sostitutiva di originale smarrito reintegrata dall'utente Maurizio Martino su supporto elettronico.$on$pE0.00$q-$rl$sm $t0$u0$v0$w0$x0$y.i10202055$z27-06-02 945 $aLE006 53.2.65 MET$g2$i2006000079389$lle006$o-$pE0.00$q-$rl$s- $t0$u1$v0$w1$x0$y.i10202067$z27-06-02 996 $aLaser-assisted microtechnology$91444915 997 $aUNISALENTO 998 $ale006$b01-01-99$cm$da $e-$feng$gde $h0$i2