LEADER 01193nam a2200265 i 4500 001 991000954709707536 008 050322s2003 flua b 001 0 eng d 020 $a1584883065 035 $ab13298355-39ule_inst 040 $aDip.to Ingegneria dell'Innovazione$beng 082 0 $a621.3 100 1 $aPelesko, John A.$0622153 245 10$aModeling MEMS and NEMS /$cJohn A. Pelesko and David H. Bernstein 260 $aBoca Raton, FL :$bChapman & Hall/CRC,$c2003 300 $axxiii, 357 p. :$bill. ; 24 cm 504 $aIncludes bibliographical references and index 650 $aMicroelectromechanical systems$xMathematical models 700 1 $aBernstein, David H. 907 $a.b13298355$b21-09-06$c11-04-05 912 $a991000954709707536 945 $aLE026 621.3 PEL 01.01 C.1 2003$cC.1$g1$i2026000023236$lle026$nProf. Laforgia / Biblioteca$op$pE59.90$q-$rl$s- $t4$u3$v0$w3$x0$y.i14067031$z12-05-05 945 $aLE026 621.3 PEL 01.01 C.2 2003$cC.2$g1$i2026000024257$lle026$nProf. Laforgia / Biblioteca$op$pE61.04$q-$rl$s- $t4$u5$v1$w5$x0$y.i14123137$z07-09-05 996 $aModeling MEMS and NEMS$91104931 997 $aUNISALENTO 998 $ale026$b22-03-05$cm$da $e-$feng$gflu$h0$i0