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008 980923s1997    us            ||| | eng  
020   $a081942403X
035   $ab10150742-39ule_inst
035   $aLE00639427$9ExL
040   $aDip.to Fisica$bita
084   $a53.2.63
084   $a621.36'6
084   $aTA1695.E9348
111 2 $aSPIE Meeting on excimer lasers, optics, and applications$0461964
245 10$aExcimer lasers, optics, and applications :$b12-13 February 1997, San José, CA /$cHarry Shields, Peter E. Dyer (eds.) ; sponsored by the International Society for Optical Engineering
260   $aBellingham :$bSPIE,$c1997
300   $avii, 160 p. :$bill. ;$c28 cm.
490 0 $aSPIE Proceedings ;$v2992
500   $aIncludes bibliographical references and index.
650  4$aExcimer lasers$xCongresses
700 1 $aShields, Harry$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0733163
700 1 $aDyer, Peter E.
710 2 $aSPIE
907   $a.b10150742$b17-02-17$c27-06-02
912   $a991000937739707536
945   $aLE006 53.2.63 SHI$g1$i2006000070256$lle006$o-$pE0.00$q-$rl$s-  $t0$u0$v0$w0$x0$y.i1018062x$z27-06-02
996   $aExcimer lasers, optics, and applications$91444816
997   $aUNISALENTO
998   $ale006$b01-01-98$cm$da  $e-$feng$gus $h0$i1