LEADER 01219nam a2200337 i 4500 001 991000937699707536 005 20020507104117.0 008 970308s1987 us ||| | eng 020 $a0892527455 035 $ab10150730-39ule_inst 035 $aLE00639426$9ExL 040 $aDip.to Fisica$bita 084 $a53(082.2) 084 $a53.2.63 084 $a621.36'63 084 $aTA1695.E934 111 2 $aSPIE Meeting on excimer lasers and optics$0461963 245 10$aExcimer lasers and optics :$b18-19 September 1986, Cambridge, MA /$cedited by Ting Shan Luk ; sponsored by the International Society for Optical Engineering 260 $aBellingham :$bSPIE,$c1987 300 $avi, 150 p. :$bill. ;$c28 cm. 490 0 $aSPIE Proceedings ;$v710 500 $aIncludes bibliography and index. 650 4$aExcimer lasers$xCongresses 700 1 $aLuk, Ting Shan 710 2 $aSPIE 907 $a.b10150730$b17-02-17$c27-06-02 912 $a991000937699707536 945 $aLE006 53.2.63 LUK$g1$i2006000046350$lle006$o-$pE0.00$q-$rl$s- $t0$u0$v0$w0$x0$y.i10180618$z27-06-02 996 $aExcimer lasers and optics$9187791 997 $aUNISALENTO 998 $ale006$b01-01-97$cm$da $e-$feng$gus $h0$i1