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111 2 $aSPIE Meeting on excimer lasers and optics$0461963
245 10$aExcimer lasers and optics :$b18-19 September 1986, Cambridge, MA /$cedited by Ting Shan Luk ; sponsored by the International Society for Optical Engineering
260   $aBellingham :$bSPIE,$c1987
300   $avi, 150 p. :$bill. ;$c28 cm.
490 0 $aSPIE Proceedings ;$v710
500   $aIncludes bibliography and index.
650  4$aExcimer lasers$xCongresses
700 1 $aLuk, Ting Shan
710 2 $aSPIE
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