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008 970307s1991    us            ||| | eng  
020   $a0819404446
035   $ab10150699-39ule_inst
035   $aLE00639422$9ExL
040   $aDip.to Fisica$bita
084   $a53.2.65
084   $a53.8.3
084   $a621.36'63
084   $aTA1695
111 2 $aSpie Conference on excimer laser materials processing and beam delivery systems$0461960
245 10$aExcimer laser materials processing and beam delivery systems :$bproceedings of SPIE (8-9 November 1990 Boston, Massachusetts) /$cBernhard P. Piwczyk (ed.)
260   $aBellingham :$bSPIE,$cc1991
300   $avii, 135 p. :$bill. ;$c28 cm.
490 0 $aSPIE Proceedings ;$v1377
500   $aIncludes bibliographical references and index.
650  4$aExcimer lasers$xCongresses
700 1 $aPiwczyk, Bernhard P.$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0733161
710 2 $aSPIE
907   $a.b10150699$b17-02-17$c27-06-02
912   $a991000937469707536
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996   $aExcimer laser materials processing and beam delivery systems$91444814
997   $aUNISALENTO
998   $ale006$b01-01-97$cm$da  $e-$feng$gus $h0$i2