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008 970307s1988    us            ||| | eng  
020   $a0819400335
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035   $aLE00639420$9ExL
040   $aDip.to Fisica$bita
084   $a53(082.2)
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110 2 $aSPIE$0461958
245 10$aExcimer beam applications :$bproc. SPIE (6 September 1988 Boston, Massachusetts) /$cAnthony N.Pirri, Bernhard P.Piwczyk (editors)
260   $aBellingham :$bSPIE,$cc1988
300   $avi, 128 p.
490 0 $aSPIE Proceedings ;$v998
700 1 $aPirri, A.N.
700 1 $aPiwczyk, Bernhard P.
907   $a.b10150675$b17-02-17$c27-06-02
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996   $aExcimer beam applications$9187793
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