LEADER 01033nam a2200301 i 4500
001 991000855719707536
005 20020507102347.0
008 931005s1991    us            ||| | eng  
020   $a0442319509
035   $ab10139059-39ule_inst
035   $aLE00637997$9ExL
040   $aDip.to Fisica$bita
084   $a621.3.4
084   $a696
084   $aTH7694.K69
100 1 $aKozicki, Michael N.$0461368
245 10$aCleanrooms :$bfacilities and practices /$cby Michael N. Kozicki, Stuart A. Hoenig, and Patrick J. Robinson
260   $aNew York :$bVan Nostrand Reinhold Co.,$cc1991
300   $ax, 374 p. ;$c24 cm.
650  4$aClean rooms
700 1 $aHoenig, Stuart A.
700 1 $aRobinson, Patrick J.
907   $a.b10139059$b21-09-06$c27-06-02
912   $a991000855719707536
945   $aLE006 621.3.4+621.3.5 KOZ$g1$i2006000052580$lle006$o-$pE0.00$q-$rl$s-  $t0$u0$v0$w0$x0$y.i10165009$z27-06-02
996   $aCleanrooms$9186779
997   $aUNISALENTO
998   $ale006$b01-01-93$cm$da  $e-$feng$gus $h0$i1