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008 970307s1987    us            ||| | eng  
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084   $a53(082.2)
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111 2 $aSPIE Conference on advanced processing of semiconductor devices$0460996
245 10$aAdvanced processing of semiconductor devices :$bproceedings of SPIE (23-25 March, 1987, Bay Point, Florida) /$cSayan D. Mukherjee (ed.)
260   $aBellingham :$bSPIE,$cc1987
300   $ax, 362 p. :$bill. ;$c28 cm.
490 0 $aSPIE Proceedings ;$v797
650  4$aSemiconductors-Design and construction$xCongresses
700 1 $aMukherjee, Sayan D.$eauthor$4http://id.loc.gov/vocabulary/relators/aut$0733119
710 2 $aSPIE
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996   $aAdvanced processing of semiconductor devices$91444707
997   $aUNISALENTO
998   $ale006$b01-01-97$cm$da  $e-$feng$gus $h0$i1