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001 991000800249707536
005 20020506123857.0
008 960420s1990    us            ||| | eng  
020   $a1558990704
035   $ab10131346-39ule_inst
035   $aLE00637059$9ExL
040   $aDip.to Fisica$bita
084   $a53(082.2)
084   $a621.3.2.4
084   $a621.381
084   $aTK7874.A333
111 2 $aSymposium on advanced metallizations in microelectronics$0460994
245 10$aAdvanced metallizations in microelectronics :$bproceedings of the symposium held April 16-20, 1990, San Francisco, California, U.S.A. /$cedited by A. Katz, S.P. Murarka, A. Appelbaum
260   $aPittsburgh :$bMaterials Research Society,$cc1990
300   $axv, 633 p. ;$c23 cm.
490 0 $aMRS Symposium Proceedings ;$v181
500   $aIncludes bibliographical references and index.
650  4$aMetallizing$xCongresses
700 1 $aAppelbaum, Ami
700 1 $aKatz, Avishay
700 1 $aMurarka, Shyam P.
710 2 $aMRS
907   $a.b10131346$b17-02-17$c27-06-02
912   $a991000800249707536
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996   $aAdvanced metallizations in microelectronics$9186111
997   $aUNISALENTO
998   $ale006$b01-01-96$cm$da  $e-$feng$gus $h0$i1