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181   $ctxt$2rdacontent
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200 12$aA novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes /$fby Rohan Deshmukh, Ryan Knight and Dr William Nothwang
210  1$aAdelphi, MD :$cUS Army Research Laboratory,$d2016.
215   $a1 online resource (vi, 38 pages) $ccolor illustrations
225 1 $aARL-TR ;$v7825
300   $a"Sep 2016."
320   $aIncludes bibliographical references (pages 34-35).
517   $aNovel vacuum packaging design process for microelectromechanical system 
606   $aGyroscopes
606   $aHermetic sealing
615  0$aGyroscopes.
615  0$aHermetic sealing.
700   $aDeshmukh$b Rohan$01421414
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