LEADER 01564nam a2200325 i 4500
001 991000183609707536
005 20020506110425.0
008 000710s1993    ne            ||| | eng  
020   $a0792322657
035   $ab10041977-39ule_inst
035   $aLE02614600$9ExL
040   $aDip.to Ingegneria dell'Innovazione$bita
082 0 $a621.38152
111 2 $aNato advanced study institute on multicomponent and multilayered thin films for advanced microtechnologies 1992 ; Bad Windsheim$0460012
245 10$aMulticomponent and multilayered thin films for advanced microtechnologies :$btechniques, fundamentals and devices /$cedited by Orlando Auciello and Jurgen Engemann
260   $aDordrecht ; Boston ; London :$bKluwer Academic Publishers,$cc 1993
300   $axv, 633 p. :$bill. ;$c25 cm.
490 0 $aNato Asi series. Series E, Applied sciences ;$vvol. 234
500   $aIl nome formale del congresso si trova sul verso del frontespizio
650  4$aCongressi$zBad Windsheim$y1992
650  4$aElettronica - Materiali - Tecnologia$xCongressi
650  4$aFilm sottili multistrato$xCongressi$y1992
700 1 $aAuciello, Orlando
700 1 $aEngemann, Jurgen
907   $a.b10041977$b17-02-17$c31-05-02
912   $a991000183609707536
945   $aLE026 621.381 52 AUC 01.01 1993$g1$i2026000009858$lle026$o-$pE0.00$q-$rn$s-  $t0$u0$v0$w0$x0$y.i10048807$z31-05-02
996   $aMulticomponent and multilayered thin films for advanced microtechnologies$9192853
997   $aUNISALENTO
998   $ale026$b01-01-00$cm$da  $e-$feng$gne $h0$i1