LEADER 01256nam a2200301 i 4500
001 991000155159707536
005 20020506105702.0
008 000615s1993    us            ||| | eng  
020   $a1558991778
035   $ab10038310-39ule_inst
035   $aLE02614094$9ExL
040   $aDip.to Ingegneria dell'Innovazione$bita
082 0 $a621.381
100 1 $aAbernathy, C.R.$0459921
245 10$aChemical perspectives of microelectronic materials III :$bsymposium held november 30-december 3, 1992, Boston, Massachussetts, Usa /$ceditors :$bC.R.Abernathy ... [ et al.]
260   $aPittsburgh :$bMaterials Research Society,$cc 1993
300   $axv, 727 p. :$bill. ;$c24 cm.
490 0 $aMaterials research society symposium proceedings ;$vv. 282
650  4$aElettronica - Materiali - Tecnologia$xCongressi
700 1 $aBates, C.W.
700 1 $aBohling, D.A.
700 1 $aHobson, W.S.
907   $a.b10038310$b17-02-17$c31-05-02
912   $a991000155159707536
945   $aLE026 621.381 ABE 01.01 1993$g1$i2026000009667$lle026$o-$pE0.00$q-$rn$s-  $t0$u0$v0$w0$x0$y.i10042131$z31-05-02
996   $aChemical perspectives of microelectronic materials III$9177340
997   $aUNISALENTO
998   $ale026$b01-01-00$cm$da  $e-$feng$gus $h0$i1