LEADER 00807nam0-22002891i-450- 001 990005627930403321 005 20060510161554.0 035 $a000562793 035 $aFED01000562793 035 $a(Aleph)000562793FED01 035 $a000562793 100 $a19990604d1934----km-y0itay50------ba 101 0 $aita 105 $ayf------00--- 200 1 $aMichele Cammarano$fFranco Girosi 210 $aRoma$cIstituto Nazionale L.U.C.E.$d1934 215 $a5 c., 24 tav.$d16 cm 225 1 $a<>arte per tutti$v54 676 $a709$v21$zita 700 1$aCammarano,$bMichele$f<1835-1920>$0210746 801 0$aIT$bUNINA$gRICA$2UNIMARC 901 $aBK 912 $a990005627930403321 952 $a709 LUCE 1$bST.ARTE 159$fFLFBC 959 $aFLFBC 996 $aMichele Cammarano$9604178 997 $aUNINA LEADER 02794nam a2200313 i 4500 001 991000092119707536 008 080711s2004 ne a b 001 0 eng d 020 $a9781402029271 035 $ab13813237-39ule_inst 040 $aDip.to Ingegneria dell'Innovazione$beng 082 0 $a621.381$221 111 2 $aNATO Advanced Study Institute on Smart Sensors and MEMS$d(2003 :$cPâovoa de Varzim, Portugal)$0629748 245 10$aSmart sensors and MEMS :$b[proceedings of the NATO Advanced Study Institute on smart sensors and MEMS, Povoa de Varzim, Portugal, 8-19 September 2003] /$cedited by Sergey Y. Yurish and Maria Teresa S.R. Gomes 260 $aDordrecht ;$aBoston :$bKluwer Academic,$cc2004 300 $axv, 480 p. :$bill. ;$c24 cm 440 0$aNATO science series.$nSeries II,$pMathematics, physics, and chemistry ;$vv. 181 504 $aIncludes bibliographical references and index 505 0 $aSmart sensors for electrical and non-electrical, physical and chemical variables: state-of-the-art / Sergey Y. Yurish -- Novel conversion methods for self-adaptive smart sensors / Sergey Y. Yurish and Nikolay V. Kirianaki -- Resonant piezoelectric devices as physical and biochemical sensors / Fabien Josse and Richard W. Cernosek -- Acoustic-wave piezoelectric and pyroelectric sensor based on PZT thick films / Vittorio Ferrari -- Wireless passive SAW identification marks and sensors / Elke Mackensen and Leonhard Reindl -- Precise vectorial magnetic sensors / Pavel Ripka -- Micro-hall magnetic sensors: physical, technologies and applications / Radivoje S. Popovic, Giovanni Boero, and Pierre-Andre Besse -- Modern silicon-based MEMS technology / Ulrich Mescheder -- Porous silicon: technology and applications for micromachining and MEMS / Ulrich Mescheder -- Thermal design of microelectronics system / Dmytro Fedasyuk and Volodymyr Makar -- Chemical and biological sensors based on microcantilevers / P.G. Datskos, N.V. Lavrik and M.J. Sepaniak -- Uncooled infrared MEMS detectors / P.G. Datskos and N.V. Lavrik -- Bulk acoustic wave sensors in chemical analysis / Maria Teresa S. R. Gomes -- Electronic biosensors based on biomaterial-nanoparticle hybrid systems / Eugenii Katz 650 4$aDetectors$xTechnological innovations$vCongresses 650 4$aMicroelectromechanical systems$vCongresses 650 4$aScanning systems$vCongresses 700 1 $aYurish, Sergey Y. 700 1 $aGomes, Maria Teresa S. R. 907 $a.b13813237$b02-04-14$c25-02-09 912 $a991000092119707536 945 $aLE026 621.381 YUR 01.01 2004$g1$i2026000044323$lle026$nProf. Tarricone / Biblioteca$op$pE207.00$q-$rl$s- $t4$u6$v1$w6$x0$y.i14935958$z27-02-09 996 $aSmart sensors and MEMS$91225782 997 $aUNISALENTO 998 $ale026$b11-07-08$cm$da $e-$feng$gne $h0$i0