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200 10$aIEEE International Conference on Nano/Micro Engineered and Molecular Systems
210  1$aPiscataway, New Jersey :$cIEEE
517 1 $a... Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
517 1 $aNEMS ...
517 1 $aProceedings of ... IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems
517 1 $aProceedings of ... IEEE International Conference on Nano/Micro Engineered and Molecular Systems
517 1 $aInternational Conference on Nano/Micro Engineered and Molecular Systems
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615  0$aNanoelectromechanical systems
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712 02$aInstitute of Electrical and Electronics Engineers,
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