LEADER 02357nam 2200397 450 001 996574635703316 005 20230414195400.0 010 $a1-66540-364-0 035 $a(CKB)5590000000440525 035 $a(NjHacI)995590000000440525 035 $a(EXLCZ)995590000000440525 100 $a20230414d2020 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$a2020 International Symposium on Semiconductor Manufacturing (ISSM) $eproceedings of technical papers : December 15-16, 2020 /$fInstitute of Electrical and Electronics Engineers 210 1$aPiscataway, New Jersey :$cIEEE,$d2020. 215 $a1 online resource (141 pages) $cillustrations 311 $a1-66544-773-7 330 $aISSM is an annual conference of semiconductor manufacturing professionals dedicated to sharing technical solutions and opinions on the advancement of manufacturing science, technologies, and management disciplines ISSM aims to establish new concepts for semiconductor manufacturing technologies and to promote them as systemized and universalized technologies ISSM s role has been to challenge the concept of shifting from know how to science in semiconductor manufacturing technologies ISSM covers the areas of interest including factory design & material handling, manufacturing strategy and operation management, manufacturing control and execution, environment safety and health, process integration, process and material optimization, yield enhancement methodology, contamination control and ultraclean technology, process control and monitoring, process and metrology equipment, DFM, and final manufacturing. 517 $a2020 International Symposium on Semiconductor Manufacturing 606 $aComputer integrated manufacturing systems$vCongresses 606 $aEngineering design$vCongresses 606 $aManufacturing processes$xData processing$vCongresses 615 0$aComputer integrated manufacturing systems 615 0$aEngineering design 615 0$aManufacturing processes$xData processing 676 $a670.285 801 0$bNjHacI 801 1$bNjHacl 906 $aPROCEEDING 912 $a996574635703316 996 $a2020 International Symposium on Semiconductor Manufacturing (ISSM)$92534250 997 $aUNISA