LEADER 01983nam 2200397 450 001 996574585603316 005 20230613165023.0 010 $a1-7281-1629-5 035 $a(CKB)4920000000250650 035 $a(NjHacI)994920000000250650 035 $a(EXLCZ)994920000000250650 100 $a20230613d2019 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$a2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) $eApril 11-14, 2019, Bangkok, Thailand /$fInstitute of Electrical and Electronics Engineers 210 1$aPiscataway, New Jersey :$cIEEE,$d2019. 215 $a1 online resource $cillustrations 311 $a1-7281-1630-9 330 $aMicro Nano Electro Mechanical Systems (M NEMS) Micro Nano Molecular Fabrication Nanomaterials Nonmaterial Based Devices and Systems Nanophotonics and Nanoscale Imaging Nanoscale Robotics, Assembly, and Automation Molecular Sensors, Actuators, and Systems Micro Nano Fluidics Micro Nano Mechanics Nanobiology Nanomedicine Nano Energy, Micro Energy Harvesting, Energy Materials Flexible Soft Materials, Sensors and Actuators Micro Nanotechnology in Neural Prostheses Micro Nano Lens and Nanoscale Imaging Nanophotonics and Microoptics 2D Nanomaterials Plasmonic and Metamaterials Others. 517 $a2019 IEEE 14th International Conference on Nano/Micro Engineered and Molecular Systems 606 $aMicrotechnology$vCongresses 606 $aMicroelectromechanical systems$vCongresses 606 $aNanoelectromechanical systems$vCongresses 615 0$aMicrotechnology 615 0$aMicroelectromechanical systems 615 0$aNanoelectromechanical systems 676 $a621.381 801 0$bNjHacI 801 1$bNjHacl 906 $aPROCEEDING 912 $a996574585603316 996 $a2019 IEEE 14th International Conference on Nano$92545158 997 $aUNISA