LEADER 00789nam 2200277 450 001 996552270303316 005 20231019112635.0 010 $a978-3-662-50008-8 100 $a20231018d2015----km y0itay5003 ba 101 0 $aeng 102 $aDE 105 $aa a 001 y 200 1 $aHandbook of thin-film technology$geditors Hartmut Frey, Hamid R. Khan 210 $aBerlin Heidelberg$cSpringer-Verlag$d2015 215 $aXIII, 379 p.$cill.$d25 cm. 606 0 $aFilm sottili$2BNCF 676 $a530.4275 702 $aFREY,$bHartmut 702 $aKHAN,$bHamid R. 801 0$aIT$bcba$gREICAT 912 $a996552270303316 951 $a530.427 HAN 1$b41404 Sci.$c530.427$d544617 959 $aBK 969 $aSCI 996 $aHandbook of thin film technology$9187353 997 $aUNISA