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011   $a1520-8559
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035   $a(CONSER)sn 98004661
035   $a(DE-599)ZDB1475424-1
035   $a(EXLCZ)99954925535070
100   $a19970721a19839999  uy             a
101 0 $aeng
135   $aurcnu|||||
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aJournal of vacuum science and technology A
210  1$aWoodbury, N.Y. :$cPublished for the American Vacuum Society by the American Institute of Physics,$d1983-
300   $aTitle from PDF of issue table of contents (AIP, viewed Nov. 9, 2006).
300   $aRefereed/Peer-reviewed
311   $a0734-2101 
330   $a"Journal of Vacuum Science &Technology A has a scope that is focused on the understanding of interfaces and surfaces at a fundamental level and to advance state-of-the-art technological applications of surface science,thin-film materials science, and vacuum science and technology."
330   $a"Coverage: Applied and fundamental surface science; atomic layer deposition; electronic and photonic materials and their processing; magnetic thin films and interfaces; materials and thin films for energy conversion and storage; photovoltaics including thin-film and organic; plasma science and technology including plasma-surface interactions,diagnostics, deposition, and etching; applications of plasmas to micro- and nanoelectronics; surface engineering; thin-film deposition, etching, properties, and characterization; TEM; in-situ TEM; tribology; vacuum science and technology."
606   $aVacuum technology$vPeriodicals
606   $aSurfaces (Physics)$vPeriodicals
606   $aSurface chemistry$vPeriodicals
606   $aVacuum technology$vPeriodicals$9lat$2nli
606   $aSurfaces (Physics)$vPeriodicals$9lat$2nli
606   $aSurface chemistry$vPeriodicals$9lat$2nli
606   $aThin films$vPeriodicals
606   $aThin films$vPeriodicals$9lat$2nli
608   $aPeriodicals$2lcgft
615  0$aVacuum technology
615  0$aSurfaces (Physics)
615  0$aSurface chemistry
615  7$aVacuum technology
615  7$aSurfaces (Physics)
615  7$aSurface chemistry
615  0$aThin films
615  7$aThin films
676   $a621
712 02$aAmerican Vacuum Society.
712 02$aAmerican Institute of Physics.
906   $aJOURNAL
912   $a996546670403316
996   $aJournal of vacuum science and technology A$93392169
997   $aUNISA