LEADER 00729oam 2200193z- 450 001 996393671303316 005 20200818165703.0 035 $a(CKB)4940000000116649 035 $a(EEBO)2240946163 035 $a(EXLCZ)994940000000116649 100 $a20191209c1656uuuu -u- - 101 0 $aeng 200 10$aDon Zara del Fogo a mock-romance / written originally in the Brittish tongue, and made English by a person of much honor, Basilius Musophilus ; with a marginall comment, expounding the hard things of the history 210 $cPrinted by T.W. for Tho. Vere ..$aEngland 700 $aHolland$b Samuel$01013961 906 $aBOOK 912 $a996393671303316 996 $aDon Zara del Fogo a mock-romance$92417945 997 $aUNISA LEADER 03130nam 22006852 450 001 9910781987803321 005 20160223141449.0 010 $a1-139-12411-0 010 $a1-107-21936-1 010 $a1-283-29560-1 010 $a1-139-12216-9 010 $a9786613295606 010 $a1-139-11642-8 010 $a1-139-11206-6 010 $a0-511-98466-9 010 $a1-139-12708-X 010 $a1-139-11425-5 035 $a(CKB)2550000000055632 035 $a(EBL)775091 035 $a(OCoLC)769341803 035 $a(SSID)ssj0000537325 035 $a(PQKBManifestationID)11352574 035 $a(PQKBTitleCode)TC0000537325 035 $a(PQKBWorkID)10553658 035 $a(PQKB)10627471 035 $a(UkCbUP)CR9780511984662 035 $a(MiAaPQ)EBC775091 035 $a(Au-PeEL)EBL775091 035 $a(CaPaEBR)ebr10502663 035 $a(CaONFJC)MIL329560 035 $a(OCoLC)759114739 035 $a(PPN)261317326 035 $a(EXLCZ)992550000000055632 100 $a20101130d2011|||| uy| 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 12$aA guide to hands-on MEMS design and prototyping /$fJoel Kubby$b[electronic resource] 210 1$aCambridge :$cCambridge University Press,$d2011. 215 $a1 online resource (xi, 166 pages) $cdigital, PDF file(s) 300 $aTitle from publisher's bibliographic system (viewed on 05 Oct 2015). 311 $a1-107-64579-4 311 $a0-521-88925-1 320 $aIncludes bibliographical references and index. 327 $aMachine generated contents note: 1. Introduction; 2. Micro-mechanics; 3. Electrostatics; 4. Optical MEMS; 5. Thermal MEMS; 6. Fluidic MEMS; 7. Package and test; 8. From prototype to product: MEMS deformable mirrors for adaptive optics. 330 $aWhether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online. 517 3 $aA Guide to Hands-on MEMS Design & Prototyping 606 $aMicroelectromechanical systems 615 0$aMicroelectromechanical systems. 676 $a621.381 686 $aTEC008080$2bisacsh 700 $aKubby$b Joel A.$0979138 801 0$bUkCbUP 801 1$bUkCbUP 906 $aBOOK 912 $a9910781987803321 996 $aA guide to hands-on MEMS design and prototyping$93811673 997 $aUNINA