LEADER 01645nas  2200517-  450 
001 996293550303316
005 20200906062704.7
011   $a2055-7434
035   $a(OCoLC)958672518
035   $a(CKB)3780000000053616
035   $a(CONSER)--2016243469
035   $a(MiAaPQ)2041946
035   $a(DE-599)ZDB2860112-9
035   $a(EXLCZ)993780000000053616
100   $a20160919a20159999  o--            -
101 0 $aeng
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 00$aMicrosystems & nanoengineering
210  1$a[London] :$cNature Publishing Group
215   $a1 online resource
300   $aRefereed/Peer-reviewed
300   $aElectronic resource type: Journal.
311   $a2096-1030 
517 1 $aMicrosystems and nanoengineering
531 10$aMicrosyst Nanoeng
606   $aMicroelectromechanical systems$vPeriodicals
606   $aNanotechnology$vPeriodicals
606   $aMicroelectromechanical systems$2fast$3(OCoLC)fst01019745
606   $aNanotechnology$2fast$3(OCoLC)fst01032639
606   $aMicro-Electrical-Mechanical Systems
606   $aNanotechnology
608   $aPeriodicals.$2fast
608   $aPeriodical.
615  0$aMicroelectromechanical systems
615  0$aNanotechnology
615  7$aMicroelectromechanical systems.
615  7$aNanotechnology.
615 12$aMicro-Electrical-Mechanical Systems.
615 22$aNanotechnology.
712 02$aZhongguo ke xue yuan.$bDian zi xue yan jiu suo.
906   $aJOURNAL
912   $a996293550303316
996   $aMicrosystems & nanoengineering$92118984
997   $aUNISA