LEADER 01042nam 2200337 450 001 996280883203316 005 20180316090927.0 010 $a1-5386-4719-2 035 $a(CKB)4100000001590490 035 $a(WaSeSS)IndRDA00095186 035 $a(EXLCZ)994100000001590490 100 $a20180316d2018 || | 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$aIMPACT $e2017 12th International Microsystems, Packaging, Assembly and Circuits Technology Conference : 25-27 October 2017 210 1$aNew York :$cIEEE,$d2018. 215 $a1 online resource (159 pages) 311 $a1-5386-4720-6 606 $aMicroelectromechanical systems$vCongresses 606 $aMicroelectronic packaging$vCongresses 615 0$aMicroelectromechanical systems 615 0$aMicroelectronic packaging 801 0$bWaSeSS 801 1$bWaSeSS 906 $aPROCEEDING 912 $a996280883203316 996 $aImpact$9977235 997 $aUNISA