LEADER 00509oam 2200181z- 450 001 996280880303316 010 $a0-7381-8473-X 035 $a(CKB)3780000000093177 035 $a(EXLCZ)993780000000093177 100 $a20190707c2013uuuu -u- - 101 0 $aeng 200 00$aIEEE/IEC P62659_D2: IEEE/IEC Draft Standard for Large Scale Manufacturing of Nanoelectronics 210 $cIEEE 517 $aIEEE/IEC P62659_D2 906 $aDOCUMENT 912 $a996280880303316 996 $aIEEE$9878179 997 $aUNISA