LEADER 01380nam  2200385   450 
001 996280709603316
005 20230814223051.0
010   $a1-5386-5071-1
035   $a(CKB)4100000005061441
035   $a(WaSeSS)IndRDA00122224
035   $a(EXLCZ)994100000005061441
100   $a20200428d2018      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$a2018 IEEE International Conference on Microelectronic Test Structures $e19-22 March 2018, Austin, TX, USA /$fIEEE Electron Devices Society
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d2018.
215   $a1 online resource (78 pages)
311   $a1-5386-5072-X 
606   $aIntegrated circuits$xTesting$vCongresses
606   $aSemiconductors$xTesting$vCongresses
606   $aElectronic apparatus and appliances$xTesting$vCongresses
615  0$aIntegrated circuits$xTesting
615  0$aSemiconductors$xTesting
615  0$aElectronic apparatus and appliances$xTesting
676   $a621.381548
712 02$aIEEE Electron Devices Society,
801  0$bWaSeSS
801  1$bWaSeSS
906   $aPROCEEDING
912   $a996280709603316
996   $a2018 IEEE International Conference on Microelectronic Test Structures$92520360
997   $aUNISA