LEADER 01092oam  2200373zu 450 
001 996280179603316
005 20210807003357.0
035   $a(CKB)111085500349126
035   $a(SSID)ssj0000454883
035   $a(PQKBManifestationID)12194225
035   $a(PQKBTitleCode)TC0000454883
035   $a(PQKBWorkID)10398480
035   $a(PQKB)11349612
035   $a(NjHacI)99111085500349126
035   $a(EXLCZ)99111085500349126
100   $a20160829d2003      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a14th Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
210 31$a[Place of publication not identified]$cIEEE$d2003
215   $a1 online resource (330 pages)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-7673-0 
606   $aProcess control$vCongresses
615  0$aProcess control
676   $a670.42
801  0$bPQKB
906   $aPROCEEDING
912   $a996280179603316
996   $a14th Annual IEEE$92505572
997   $aUNISA