LEADER 01262nam 2200397 450 001 996279996803316 005 20230803194712.0 010 $a1-4799-4677-X 010 $a1-4799-4676-1 035 $a(CKB)2560000000337374 035 $a(WaSeSS)IndRDA00094619 035 $a(WaSeSS)IndRDA00119974 035 $a(EXLCZ)992560000000337374 100 $a20200310d2014 uy 0 101 0 $aeng 135 $aur||||||||||| 181 $ctxt$2rdacontent 182 $cc$2rdamedia 183 $acr$2rdacarrier 200 10$a2014 Spring Symposium $efrom lab to life : field based applications of MEMS & NEMS (MAMNA) : March 10, 2014, Baltimore MD. /$fIEEE 210 1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers,$d2014. 215 $a1 online resource (125 pages) 311 $a1-4799-7865-5 311 $a1-4799-4678-8 606 $aNanotechnology$vCongresses 606 $aMicrotechnology$vCongresses 615 0$aNanotechnology 615 0$aMicrotechnology 676 $a620.5 712 02$aInstitute of Electrical and Electronics Engineers, 801 0$bWaSeSS 801 1$bWaSeSS 906 $aPROCEEDING 912 $a996279996803316 996 $a2014 Spring Symposium$92500435 997 $aUNISA