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200 10$a2016 14th International Baltic Conference on Atomic Layer Deposition (BALD) /$fInstitute of Electrical and Electronics Engineers (IEEE)
210  1$aPiscataway, New Jersey :$cInstitute of Electrical and Electronics Engineers (IEEE),$d2016.
215   $a1 online resource (various pagings) $cillustrations
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330   $aBALD 2016 will provide possibilities to publish results of recent studies on atomic layer deposition (ALD) and to initiate and support collaboration between research groups working in this field and applications from advanced electronics, microsystems, and displays to energy capture and storage, solid state lighting, biotechnology, security, and consumer products particularly for any advanced technologies that require control of film structure in the nanometer or sub nanometer scale.
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606   $aAtomic layer deposition
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606   $aElectronics$vCongresses
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