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100   $a20230613d2015      uy             0
101 0 $aeng
135   $aur|||||||||||
181   $ctxt$2rdacontent
182   $cc$2rdamedia
183   $acr$2rdacarrier
200 10$aOptical MEMS and Nanophotonics (OMN) $e2015 International Conference on /$fInstitute of Electrical and Electronics Engineers
210  1$aPiscataway :$cIEEE,$d2015.
215   $a1 online resource (xxiii, 158 pages) $cillustrations (some color)
311   $a1-4673-6836-9 
311   $a1-4673-6834-2 
330   $aOptical MEMS and nanophotonics describes actuators and structures interacting with light for manipulation in applications and fields such as sensing, telecom, imaging, and bio engineering, creating microlenses, diffractive elements, displays, micromirrors, subwavelength optics, and more.
517   $a2015 International Conference on Optical MEMS and Nanophotonics 
517   $a2015 International Conference on Optical MEMS and Nanophotonics (OMN)
517   $aOptical MEMS and Nanophotonics 
606   $aMicroelectromechanical systems$vCongresses
606   $aNanophotonics$vCongresses
615  0$aMicroelectromechanical systems
615  0$aNanophotonics
676   $a621
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801  1$bNjHacl
906   $aPROCEEDING
912   $a996279747303316
996   $aOptical MEMS and Nanophotonics (OMN)$93380762
997   $aUNISA