LEADER 01213oam  2200385zu 450 
001 996279728803316
005 20210807002706.0
010   $a1-4673-5007-9
035   $a(CKB)3280000000025605
035   $a(SSID)ssj0001106195
035   $a(PQKBManifestationID)12489344
035   $a(PQKBTitleCode)TC0001106195
035   $a(PQKBWorkID)11057224
035   $a(PQKB)11308287
035   $a(NjHacI)993280000000025605
035   $a(EXLCZ)993280000000025605
100   $a20160829d2013      uy 
101 0 $aeng
135   $aur|||||||||||
181   $ctxt
182   $cc
183   $acr
200 10$a2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
210 31$a[Place of publication not identified]$cIEEE$d2013
215   $a1 online resource (408 pages) $cillustrations (black and white)
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a1-4673-5006-0 
606   $aProcess control$vCongresses
615  0$aProcess control
676   $a670.42
801  0$bPQKB
906   $aPROCEEDING
912   $a996279728803316
996   $a2013 24th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)$92506087
997   $aUNISA