LEADER 01246oam  2200373zu 450 
001 996218432303316
005 20210807003333.0
035   $a(CKB)111026746704768
035   $a(SSID)ssj0000558518
035   $a(PQKBManifestationID)12198047
035   $a(PQKBTitleCode)TC0000558518
035   $a(PQKBWorkID)10566155
035   $a(PQKB)10408758
035   $a(EXLCZ)99111026746704768
100   $a20160829d1992      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aIEEE Micro Electro Mechanical Systems, 1992
210 31$a[Place of publication not identified]$cIEEE$d1992
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-0497-7 
676   $a620.4
701  0$aBenecke$b W$g(Wolfgang)$01232096
701  0$aPetzold$b H.-C$g(Hans-Christian)$01232097
712 02$aIEEE Robotics and Automation Society.
712 02$aInstitute of Electrical and Electronics Engineers.$bGerman Section.
712 12$aIEEE Workshop on Micro Electro Mechanical Systems$f(1992 :$eTravemu?nde, Lu?beck, Germany)
801  0$bPQKB
906   $aBOOK
912   $a996218432303316
996   $aIEEE Micro Electro Mechanical Systems, 1992$92860786
997   $aUNISA