LEADER 01360nas  2200433 a 450 
001 996218051003316
005 20221206110008.0
011   $a1873-5568
035   $a(OCoLC)39061749
035   $a(CKB)954925484690
035   $a(CONSER)  2005233292
035   $a(DE-599)ZDB1497065-X
035   $a(EXLCZ)99954925484690
100   $a19980505a19839999  sy             a
101 0 $aeng
135   $aurmnu|||||
200 10$aMicroelectronic engineering$b[e-journal]
210   $aAmsterdam $cElsevier Science Pub. Co.$d1983-
300   $aTitle from contents screen (ScienceDirect, viewed Nov. 4, 2005).
300   $aRefereed/Peer-reviewed
311   $a0167-9317 
517   $aMicroelectronic Engineering
531   $aMICROELECTRON ENG
531   $aMICROEL ENG
531 0 $aMicroelectron. eng.
531   $aMICROELECTRON. ENG
606   $aSemiconductors$xDesign and construction$vPeriodicals
606   $aSemiconductor industry$vPeriodicals
606   $aMicroelectronics$vPeriodicals
606   $aNanoelectronics$vPeriodicals
608   $aPeriodicals.
615  0$aSemiconductors$xDesign and construction
615  0$aSemiconductor industry
615  0$aMicroelectronics
615  0$aNanoelectronics
906   $aJOURNAL
912   $a996218051003316
996   $aMicroelectronic engineering$91895898
997   $aUNISA