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101 0 $aeng
200 10$aMAM '97, abstracts booklet $eEuropean Workshop: Materials for Advanced Metallization, Villard-de-Lans, France, March 16-19, 1997
606   $aIntegrated circuits$xVery large scale integration$xDesign and construction$xCongresses
606   $aMetallizing$xCongresses
606   $aSemiconductor-metal boundaries$xCongresses
615  0$aIntegrated circuits$xVery large scale integration$xDesign and construction$xCongresses.
615  0$aMetallizing$xCongresses.
615  0$aSemiconductor-metal boundaries$xCongresses.
676   $a621.39/5
712 02$aInternational Union for Vacuum Science, Technique and Applications.
712 02$aFrance.$bMiniste?re de l'e?ducation nationale, de l'enseignement supe?rieur, de la recherche et de l'insertion professionnelle.
712 02$aIEEE Electron Devices Society.
906   $aPROCEEDING
912   $a996217385403316
996   $aMAM '97, abstracts booklet$92860437
997   $aUNISA