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100   $a20160829d2002      uy              
101 0 $aeng
181   $ctxt
182   $cc
183   $acr
200 10$aTwenty Seventh Annual IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium : [proceedings] : July 17-18, 2002, the Fairmont Hotel, San Jose, CA, USA
210 31$a[Place of publication not identified]$cIEEE$d2002
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-7301-4 
606   $aElectronic industries$xDesign and construction$vCongresses
606   $aElectronic packaging$vCongresses
606   $aSemiconductors$vCongresses
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
606   $aElectrical Engineering$2HILCC
615  0$aElectronic industries$xDesign and construction
615  0$aElectronic packaging
615  0$aSemiconductors
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
615  7$aElectrical Engineering
676   $a621.381
712 02$aSemiconductor Equipment and Materials International
712 02$aComponents, Packaging & Manufacturing Technology Society
712 02$aInstitute of Electrical and Electronics Engineers
712 12$aIEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium
801  0$bPQKB
906   $aPROCEEDING
912   $a996216905403316
996   $aTwenty Seventh Annual IEEE$92527821
997   $aUNISA