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200 10$a10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada
210 31$a[Place of publication not identified]$cIEEE$d2002
300   $aBibliographic Level Mode of Issuance: Monograph
311   $a0-7803-7465-7 
606   $aSemiconductors$xHeat treatment$vCongresses
606   $aRapid thermal processing$xDefects$vCongresses
606   $aSemiconductor doping$vCongresses
606   $aSemiconductors$vCongresses
606   $aElectrical Engineering$2HILCC
606   $aElectrical & Computer Engineering$2HILCC
606   $aEngineering & Applied Sciences$2HILCC
615  0$aSemiconductors$xHeat treatment
615  0$aRapid thermal processing$xDefects
615  0$aSemiconductor doping
615  0$aSemiconductors
615  7$aElectrical Engineering
615  7$aElectrical & Computer Engineering
615  7$aEngineering & Applied Sciences
702   $aGelpey$b Jeffrey C
712 02$aIEEE Electron Devices Society
712 12$aInternational Conference on Advanced Thermal Processing of Semiconductors
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912   $a996216841703316
996   $a10th IEEE International Conference on Advanced Thermal Processing of Semiconductors--RTP 2002 : September 25-27, 2002, the Coast Plaza Hotel, Vancouver, Canada$92500993
997   $aUNISA